Cell Line
Automation

Robo-Technik is a specialized provider of industry-specific automation solutions. They focus on developing, designing and manufacturing highly accurate high-speed automated solutions to meet each customer's specific requirements. Their goal is to partner with each customer to increase manufacturing throughput and yield, while reducing the COO.

Automatic Loading & Unloading from Wet Benches for Texturing & PSG Removal

Features

  • Throughput up to 4,500 wafers per hour
  • Uptime > 98%
  • Breakage rate < 0.1%
  • Input: Cassette or Stack
  • Output: kinds of cassette
  • Optional online provides high precision weighting
  • Optional match 5, 8, 10 lanes
  • Optional support MES interface and remote debug function
  • Optional UMORE robot interface
  • Smart Machine, OEE statistics & Energy consumption analysis

Automatic Loading & Unloading from Diffusion

  • Throughput up to 8,500 wafers per hour
  • Uptime > 98%
  • Breakage rate < 0.1%

Features

  • Loading and unloading: Cassette
  • Input: Cassette or Stack
  • Output: kinds of cassette
  • Optional online provides high precision weighting
  • Optional match 5,8,10 lanes
  • Optional support MES interface and remote debug function
  • Optional UMORE robot interface
  • Smart Machine, OEE statistics & Energy consumption analysis

Automatic Loading & Unloading from PECVD (TUBE)

  • Throughput up to 4,000 wafers per hour
  • Uptime > 98%
  • Breakage rate < 0.1%

Features

  • Loading and unloading: Cassette or Stack
  • Output: graphite boat/graphite carrier box
  • Boat temperature monitoring
  • Optional online colour inspection
  • Optional support MES interface and remote debug function
  • Optional UMORE robot interface
  • Smart Machine, OEE statistics & Energy consumption analysis

Automatic Loading & Unloading from PECVD (TRAY)

  • Throughput upto 4,000 wafers per hour
  • Uptime > 98%
  • Breakage rate < 0.1%

Features

  • Loading and unloading: Cassette
  • Output: graphite cart
  • Optional support MES interface and remote debug function
  • Optional UMORE robot interface
  • Smart Machine, OEE statistics & Energy consumption analysis

Manufacturing Execution System

  • Production Control
  • Traceability
  • Quality Control
  • Statistical Process Control
  • Design of Experiment

Features

  • Real time data collection
  • Real time data analysis
  • Real time quality control
  • High performance traceability
  • SAP analysis
  • DOE for production engineering